Analizatoare de Gaz Rezidual (RGA) și Spectrometre de Masă - 100 AMU CPM
FAST, FIELD-READY PROCESS MONITORING SYSTEM
Performance, Reliability, and Versatility
INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
Transpector CPM 3 provides proven return on investment to our partners through:
1 Ion source pressure reading @ low emission using total pressure lens
2 Total pressure accuracy @ low emission
3 Maximum ion source operating pressure @ low emission
4 2x10 -4 Torr in the ion source will produce about 1x10 -5 Torr in the quadrupole region
5 MDPP at the ion source with EM on and 1s dwell time
6 Mass 40 contribution onto 41 AMU
7 Zero blast...
Resolution:1 amu wide @ 10% peak height
Total Pressure Range¹:5E-7 - 1E-3 Torr
Total Pressure Accuracy²:+/- 25% 1E-6 - 1E-3 Torr
Maximum Ion Source Operating Pressure³:1E-3 Torr
Nominal Operating Pressure⁴:2E-4 Torr
System Operating Pressure:1E-8 Torr - 1.2 atm
Sensitivity (Low Emission):> 4E-6 Amps/Torr
Sensitivity (High Emission):> 2E-5 Amps/Torr
Minimum Detectable Partial Pressure⁵:1E-13 Torr
Maximum Data Rate:1.8 ms/point (555 points/sec)
Abundance Sensitivity⁶:< 5 ppm
Zero Blast⁷:< 2 ppm
Detection Limit⁸:< 1 ppm
Linearity⁹:+/- 20%
Minimum Background Pressure:1E-8 Torr
Maximum Sensor and Inlet Temperature:150